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Plasma processing apparatus and method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Plasma processing apparatus and method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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Plasma processing apparatus and method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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Plasma processing apparatus and method with controlled...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Plasma processing apparatus and plasma processing method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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Plasma processing apparatus and plasma processing method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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Plasma processing apparatus and plasma processing method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Plasma processing apparatus and plasma processing method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Plasma processing comprising three rotational motions of an...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Plasma processing method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Plasma processing method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Plasma Processing method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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Plasma processing method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Plasma processing method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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Plasma processing method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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Plasma processing method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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Plasma processing method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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Plasma processing method and apparatus using plasma produced by

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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Plasma processing method and equipment used therefor

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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Plasma processing method and plasma etching method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

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