Active species control with time-modulated plasma

Adjustable dc bias control in a plasma reactor

Adjusting DC bias voltage in plasma chambers

Anisotropic etching method and apparatus

Anisotropic etching method and apparatus

Anisotropic nitride etch process with high selectivity to...

Aperture fill

Apparatus and method for electrostatically shielding an...

Apparatus and method for enhancing the uniform etching...

Apparatus and method for plasma etching

Apparatus and method for reactive atom plasma processing for...

Apparatus and method for reactive atom plasma processing for...

Apparatus and method for reactive atom plasma processing for...

Apparatus and method for surface treatment

Apparatus and method of producing a negative ion plasma

Apparatus and methods for upgraded substrate processing...

Apparatus for and method of processing an object to be...

Apparatus for generating gas plasma, gas composition for...

Apparatus for microwave processing in a magnetic field

Application of the CVD bilayer ARC as a hard mask for...