Magnetic barrier for plasma in chamber exhaust

Manufacturing method of semiconductor device

Method and an electrode system for excitation of a plasma

Method and apparatus for achieving etch rate uniformity in a rea

Method and apparatus for electrostatically maintaining...

Method and apparatus for electrostatically maintaining...

Method and apparatus for enhancing outcome uniformity of direct-

Method and apparatus for etching and deposition using...

Method and apparatus for etching film layers on large substrates

Method and apparatus for etching surfaces with atomic fluorine

Method and apparatus for etching titanate with organic acid reag

Method and apparatus for frequency control of piezoelectric...

Method and apparatus for generating a low pressure plasma

Method and apparatus for large-scale diamond polishing

Method and apparatus for low energy electron enhanced etching an

Method and apparatus for low energy electron enhanced etching of

Method and apparatus for low energy electron enhanced etching of

Method and apparatus for low energy electron enhanced...

Method and apparatus for photomask fabrication

Method and apparatus for plasma control