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  5. Gas phase etching of substrate
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Ultrashort pulse high repetition rate laser system for biologica

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Use of perfluoroketones as vapor reactor cleaning, etching,...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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