Hermetic low dielectric constant layer for barrier applications
High aspect ratio contacts
High aspect ratio etch using modulation of RF powers of...
High etch rate residue free metal etch process with low frequenc
High frequency plasma process wherein the plasma is executed by
High pressure high non-reactive diluent gas content high...
High selectivity etch using an external plasma discharge
High-density plasma etching of carbon-based low-k materials...
High-density plasma, organic anti-reflective coating etch...
High-frequency semiconductor wafer processing apparatus and meth
Highly selective high aspect ratio oxide etch method and product
Highly selective process for etching oxide over nitride...
Honeycomb optical window deposition shield and method for a...