Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate
2005-01-11
2005-01-11
Padgett, Marianne (Department: 1762)
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
C427S576000, C427S569000, C118S7230MW, C118S726000, C204S192150, C204S192170, C204S298090, C204S298120
Reexamination Certificate
active
06841202
ABSTRACT:
The invention concerns a device and a method for coating and/or surface modification of objects in a vacuum using a plasma, where there is the possibility of coating or modifying variform objects on all sides without a large expense for plant or process engineering being necessary. In accordance with the invention, a box structure (1) of an electrically conductive material that forms a vacuum chamber or can be inserted into a vacuum chamber is used. Objects (2) can be introduced into the box structure to at least one closable opening (8) at a distance from the inner wall. In addition, there are at least one opening (3) for supply and at least one opening (4) for removal of the operating gas as well as one opening (6,6′) for introduction of energy for generation of a glow discharge and the box structure (1) has a potential that is electrically negative with respect to the plasma generated by the glow discharge.
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Japanese Patent Abstract 09241824, pub. date. Sept. 1997.
Fraunhofer-Gesellschaft zur Forderung
Howard & Howard
Padgett Marianne
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