Particle manipulation

Passivation of electronic modules using high density plasmas

PCVD apparatus and a method of manufacturing an optical...

PECVD of compounds of silicon from silane and nitrogen

PECVD of silicon nitride films

PECVD process for forming BPSG with low flow temperature

Plasma apparatus and method

Plasma chemical vapor deposition process for producing a hard mu

Plasma CVD method

Plasma CVD method and apparatus

Plasma CVD method and plasma CVD apparatus

Plasma CVD method for producing a diamond coating

Plasma CVD method of producing a gradient layer

Plasma CVD method, plasma CVD apparatus, and electrode

Plasma CVD of amorphous silicon thin film

Plasma CVD of carbonaceous films on substrate having reduced met

Plasma CVD of silicon nitride thin films on large area glass sub

Plasma CVD process

Plasma CVD process and semiconductor device having metal film fo

Plasma CVD process for coating a basic metallic body with a non-