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Vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vapor deposition apparatus and method for forming thin film

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vapor deposition apparatus and method of using same

Coating apparatus – Gas or vapor deposition
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Vapor deposition apparatus and vapor deposition method

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vapor deposition apparatus for using solid starting materials

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vapor deposition coating machine

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Vapor deposition film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vapor deposition method and vapor deposition apparatus for...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Vapor deposition of anti-stiction layer for micromechanical...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Vapor deposition source and vapor deposition apparatus...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Vapor deposition system

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Vapor deposition system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Vapor deposition system and vapor deposition method

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Vapor deposition system using benzotriazole (BTA) and...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Vapor deposition temperature control apparatus and method

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Vapor forming devices

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Vapor growth apparatus and vapor growth method capable of growin

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Vapor growth apparatus for semiconductor devices

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vapor growth apparatus having a diffuser section containing a fl

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Vapor nozzle with gas barrier bars

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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