Vapor deposition system using benzotriazole (BTA) and...

Details Vapor deposition system using benzotriazole (BTA) and... Vapor deposition system using benzotriazole (BTA) and...

2007-09-17

2009-06-23

Pert, Evan (Department: 2826)

Coating apparatus

Gas or vapor deposition

Reexamination Certificate

active

07550046

ABSTRACT:
A method of protecting an interconnect is provided. The method includes forming an integrated circuit structure having an interconnect, and depositing vaporized benzotriazole on the interconnect.

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