Vapor nozzle with gas barrier bars

Details Vapor nozzle with gas barrier bars Vapor nozzle with gas barrier bars

1986-01-16

1987-07-28

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118718, 118720, 118721, 118724, 118726, 118727, 118729, 118730, 239290, 239296, 239299, 427 81, 427286, G23C 1400

Patent

active

046825657

ABSTRACT:
A vacuum vapor depositing system in which a plurality of vapor delivering nozzles fit between, and are guided by, bars supplying inert gas as barrier regions controlling the lateral spread of the vaporized material being deposited.

REFERENCES:
patent: 2088542 (1937-07-01), Westin
patent: 3498259 (1970-03-01), Braguier
patent: 3866565 (1975-02-01), Ridout
patent: 4301765 (1981-11-01), Behn et al.
patent: 4423956 (1984-01-01), Gordon
patent: 4478878 (1984-10-01), Neuwald

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