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Thin film deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Thin film deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film deposition apparatus for semiconductor

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Thin film deposition apparatus including a vacuum transport mech

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Thin film deposition apparatus using an RF glow discharge

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film deposition apparatus, mainly dedicated to PECVD and sp

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film deposition chamber

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film deposition chamber with ECR-plasma source

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film deposition reactor

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Thin film formation apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film formation apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film formation apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film formation apparatus including engagement members...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Thin film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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