Rapid thermal heating apparatus including a substrate support an

Details Rapid thermal heating apparatus including a substrate support an Rapid thermal heating apparatus including a substrate support an

1995-07-28

1998-11-24

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Work support

118728, 118500, 118 50, 118 501, C23C 1600

Patent

active

058401253

ABSTRACT:
A rapid thermal heating apparatus including a substrate support and a bearing assembly in a processing chamber. The substrate support is mounted on the bearing assembly so that it may be rotated. A rotatable drive ring is located external to the processing chamber. The drive ring provides a force to couple the bearing assembly to the drive ring without the use of a vacuum seal so that rotation of the drive ring causes the substrate support to rotate.

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