Raw material feeding device, film formation system and...

Details Raw material feeding device, film formation system and... Raw material feeding device, film formation system and...

2006-07-25

2011-10-04

Hassanzadeh, Parviz (Department: 1716)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C427S248100

Reexamination Certificate

active

08029621

ABSTRACT:
A raw material feeding device for feeding a gaseous raw material formed by sublimating a solid raw material to a film formation system includes a raw material container for holding the solid raw material therein, a first heating unit placed at a first side of the container, a second heating unit placed at a second side thereof, the first temperature control unit for conducting a first process of controlling the first and the second heating unit to make the temperature of the first side higher than that of the second side to thereby sublimate the solid raw material disposed at the first side, and the second temperature control unit for conducting a second process of controlling the first and the second heating unit to make the temperature of the second side higher than that of the first side to thereby sublimate the solid raw material disposed at the second side.

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