Reaction apparatus

Details Reaction apparatus Reaction apparatus

2006-09-05

2006-09-05

Fletcher, Marlon T. (Department: 2837)

Coating apparatus

Gas or vapor deposition

Chamber seal

C118S050000, C220S315000, C220S810000, C016S235000, C016S239000

Reexamination Certificate

active

07101442

ABSTRACT:
A reaction apparatus including: a main body having a reaction chamber with an upper opening thereof, a lid hinge, and a lid combined to the lid hinge, rotationally opening and closing the upper opening; a lifting member having a first end part separated from a rotation axis of the lid and rotatably combined with the lid, and a second end part rotatably combined to the main body, that moves in opening and closing directions; and a driver activating the lifting member. With this configuration, the present invention provides a reaction apparatus, with a lid that is opened and closed readily, and in which the lid parallelly contacts a sealing member, and thereby creating a vacuum in the reaction chamber with ease.

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Copy of Korean Office Action.

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