Multi-core transformer plasma source

Multi-core transformer plasma source

Multi-electrode plasma processing apparatus

Multi-gas straight channel showerhead

Multi-layer susceptor for rapid thermal process reactors

Multi-layer susceptor for rapid thermal process reactors

Multi-ledge substrate support for a thermal processing chamber

Multi-part electrode for a semiconductor processing plasma...

Multi-place coating apparatus and process for plasma coating

Multi-port gas injector for a vertical furnace used in...

Multi-position load lock chamber

Multi-purpose processing chamber with removable chamber liner

Multi-station deposition apparatus and method

Multi-target manipulator for pulsed laser deposition apparatus

Multi-thermal zone shielding apparatus

Multi-tray film precursor evaporation system and thin film...

Multi-workpiece processing chamber

Multi-workpiece processing chamber

Multi-zone gas flow control in a process chamber

Multi-zone gas injection apparatus and method for microelectroni