Multi-zone gas flow control in a process chamber

Details Multi-zone gas flow control in a process chamber Multi-zone gas flow control in a process chamber

1996-07-24

2000-07-18

Lund, Jeffrie R

Coating apparatus

Gas or vapor deposition

With treating means

118715, 118724, 118 501, 392416, 392418, 219390, 219405, 219411, 239450, 239555, 239558, 239589, 239596, C23C 1600, F27B 504, F27B 516

Patent

active

060902108

ABSTRACT:
A showerhead for introducing gas from one or more external supplies into a substrate processing chamber, the showerhead including a faceplate including a plurality of gas injection ports through which gas is injected into the chamber, wherein the plurality of gas injection ports includes a first subset of gas injection ports and a second subset of gas injection ports; a first gas distribution system which during use delivers a first gas to the first subset of injection ports for injection into the chamber; and a second gas distribution system which during use delivers a second gas to the second subset of injection ports for injection into the chamber.

REFERENCES:
patent: 3381114 (1968-04-01), Nakanuma
patent: 3854443 (1974-12-01), Baerg
patent: 4880163 (1989-11-01), Kobayashi et al.
patent: 5094013 (1992-03-01), Martin et al.
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5156820 (1992-10-01), Wong et al.
patent: 5453124 (1995-09-01), Moslehi et al.
patent: 5500256 (1996-03-01), Watabe
patent: 5516722 (1996-05-01), Kim
patent: 5532190 (1996-07-01), Goodyear et al.
patent: 5624498 (1997-04-01), Lee et al.
patent: 5653806 (1997-08-01), Van Buskirk
patent: 5660472 (1997-08-01), Peuse et al.
patent: 5781693 (1998-07-01), Ballance et al.
patent: 5824158 (1998-10-01), Takeuchi et al.
patent: 5871586 (1999-02-01), Crawley et al.
Copy of European Search Report dated Nov. 11, 1997.

Affiliated with

Also associated with

Rating

Multi-zone gas flow control in a process chamber does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multi-zone gas flow control in a process chamber, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multi-zone gas flow control in a process chamber will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2032499