Multi-purpose processing chamber with removable chamber liner

Details Multi-purpose processing chamber with removable chamber liner Multi-purpose processing chamber with removable chamber liner

2006-03-14

2006-03-14

Hassanzadeh, Parviz (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

Reexamination Certificate

active

07011039

ABSTRACT:
A multi-purpose chamber that can be configured for a variety of processes, including deposition processes and etch processes, for example, by installing one or more removable chamber liners. The multi-purpose chamber provides uniform plasma confinement around a substrate disposed in the chamber for various processing conditions. The multi-purpose chamber also provides efficient and uniform exhaust of processing gas from the chamber.

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