Multi-workpiece processing chamber

Details Multi-workpiece processing chamber Multi-workpiece processing chamber

2007-08-15

2011-11-29

Moore, Karla (Department: 1716)

Coating apparatus

Gas or vapor deposition

Multizone chamber

C118S7230AN, C156S345310, C156S345290

Reexamination Certificate

active

08066815

ABSTRACT:
A multi-workpiece chamber includes at least two processing stations, for exposing workpieces to a treatment process. A partition cooperates with the chamber such that the partition is disengagably removable from the chamber and re-engagable with the chamber for selectively dividing the processing stations. The partition is configured to provide for non-line-of-sight travel of certain ones of the process related products between the processing stations. An exhaust arrangement divides exhaust flow into at least two approximately equal exhaust flow portions that leave the multi-workpiece chamber in a way which enhances uniformity of the treatment process for the stations. A partition configuration is described including a partition portion between the stations and a baffle portion extending into an exhaust arrangement. A modified partition arrangement is provided for use in establishing a modified exchange characteristic of the process related products.

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