Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2008-04-29
2008-04-29
Hassanzadeh, Parviz (Department: 1792)
Coating apparatus
Gas or vapor deposition
With treating means
C156S345480
Reexamination Certificate
active
10768607
ABSTRACT:
A transformer-coupled plasma source using toroidal cores forms a plasma with a high-density of ions along the center axis of the torus. In one embodiment, cores of a plasma generator are stacked in a vertical alignment to enhance the directionality of the plasma and generation efficiency. In another embodiment, cores are arranged in a lateral array into a plasma generating plate that can be scaled to accommodate substrates of various sizes, including very large substrates. The symmetry of the plasma attained allows simultaneous processing of two substrates, one on either side of the plasma generator.
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Cox Michael S.
Lai Canfeng
Loewenhardt Peter K.
Shamouilian Shamouil
Tanaka Tsutomu
Applied Materials Inc.
Arancibia Maureen G
Hassanzadeh Parviz
Townsend and Townsend and Crew
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