Multi-target manipulator for pulsed laser deposition apparatus

Details Multi-target manipulator for pulsed laser deposition apparatus Multi-target manipulator for pulsed laser deposition apparatus

1997-08-27

1999-08-24

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

427596, C23C 1400

Patent

active

059420405

ABSTRACT:
Disclosed is a multi-target manipulator for a pulsed laser deposition apparatus. The multi-target manipulator for a pulsed laser deposition apparatus grows a thin film having both a high quality and a repeatability, automatizes a deposition apparatus, and economically performs a pulsed laser deposition, when a thin film is grown by using a pulsed laser deposition apparatus. The multi-target manipulator for a pulsed laser deposition apparatus includes: a driving power providing member which includes a stepping motor and a motion feedthrough thereby providing a rotation driving power to the target disk driving shaft and the target driving motor shaft; a driving power transmission and head supporting member, thereby transmitting a rotation driving power necessary for rotating both the target disk provided from the driving power providing member and the target and supporting the head of the target manipulator; and a head portion, thereby performing rotations of the target disk and the target so as to locate a target material on the focal point of the laser beam.

REFERENCES:
patent: 5212148 (1993-05-01), Roas
patent: 5534071 (1996-07-01), Varshney
patent: 5747120 (1998-05-01), McLean

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