Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2004-11-29
2009-12-29
Cleveland, Michael (Department: 1792)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
C392S389000
Reexamination Certificate
active
07638002
ABSTRACT:
A high conductance, multi-tray solid precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing deposition rate by increasing exposed surface area of solid precursor. The multi-tray solid precursor evaporation system includes a base tray with one or more upper trays. Each tray is configured to support and retain film precursor in, for example, solid powder form or solid tablet form. Additionally, each tray is configured to provide for a high conductance flow of carrier gas over the film precursor while the film precursor is heated. For example, the carrier gas flows inward over the film precursor, and vertically upward through a flow channel within the stackable trays and through an outlet in the solid precursor evaporation system.
REFERENCES:
patent: 3003249 (1961-10-01), Templeton
patent: 3801294 (1974-04-01), Schultz et al.
patent: 4190965 (1980-03-01), Erickson
patent: 4378987 (1983-04-01), Miller et al.
patent: 4817557 (1989-04-01), Diem et al.
patent: 4948623 (1990-08-01), Beach et al.
patent: 5221354 (1993-06-01), Rigney
patent: 5904771 (1999-05-01), Tasaki et al.
patent: 5914001 (1999-06-01), Hansen
patent: 6024915 (2000-02-01), Kume et al.
patent: 6113982 (2000-09-01), Claar et al.
patent: 6203619 (2001-03-01), McMillan
patent: 6270839 (2001-08-01), Onoe et al.
patent: 6380080 (2002-04-01), Visokay
patent: 6440494 (2002-08-01), Arena-Foster
patent: 6544345 (2003-04-01), Mayer et al.
patent: 6718126 (2004-04-01), Lei
patent: 6897160 (2005-05-01), Derderian et al.
patent: 6921062 (2005-07-01), Gregg et al.
patent: 7122085 (2006-10-01), Shero et al.
patent: 7132128 (2006-11-01), Brcka
patent: 7273814 (2007-09-01), Matsuda
patent: 7279421 (2007-10-01), Suzuki
patent: 2002/0013052 (2002-01-01), Visokay
patent: 2002/0187632 (2002-12-01), Marsh
patent: 2003/0019428 (2003-01-01), Ku et al.
patent: 2003/0053799 (2003-03-01), Lei
patent: 2003/0111014 (2003-06-01), Donatucci et al.
patent: 2003/0203617 (2003-10-01), Lane et al.
patent: 2003/0211736 (2003-11-01), Ludviksson et al.
patent: 2004/0016404 (2004-01-01), Gregg et al.
patent: 2004/0025370 (2004-02-01), Guenther
patent: 2004/0161545 (2004-08-01), Montano et al.
patent: 2004/0206935 (2004-10-01), Miura et al.
patent: 2005/0006799 (2005-01-01), Gregg et al.
patent: 2005/0072357 (2005-04-01), Shero et al.
patent: 2005/0147749 (2005-07-01), Liu et al.
patent: 2006/0110530 (2006-05-01), Suzuki et al.
patent: 2006/0110918 (2006-05-01), Suzuki
patent: 2006/0115589 (2006-06-01), Vukovic
patent: 2006/0115593 (2006-06-01), Suzuki et al.
patent: 2006/0182886 (2006-08-01), Guidotti et al.
patent: 2006/0211228 (2006-09-01), Matsuda
patent: 2006/0219168 (2006-10-01), Brcka
patent: 2006/0220248 (2006-10-01), Suzuki
patent: 2006/0222769 (2006-10-01), Brcka
patent: 2007/0032079 (2007-02-01), Suzuki et al.
patent: 2007/0072414 (2007-03-01), Suzuki
patent: 2007/0113789 (2007-05-01), Brcka
patent: 2007/0170604 (2007-07-01), Soininen
patent: 2007/0237895 (2007-10-01), Suzuki et al.
patent: 2008/0003360 (2008-01-01), Suzuki et al.
patent: 2008/0035062 (2008-02-01), Suzuki
patent: 2008/0081473 (2008-04-01), Suzuki
patent: 2008/0241357 (2008-10-01), Suzuki
patent: 098445 (1993-04-01), None
patent: 06306584 (1994-11-01), None
patent: WO 2004/010463 (2004-01-01), None
patent: WO2004011695 (2004-02-01), None
patent: 2006058310 (2006-06-01), None
Webster's Ninth New Collegiate Dictionary, Merriam-Webster, 1986, pp. 823 and 826.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/007,961, dated Mar. 6, 2008, 11 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/007,962, dated Jan. 9, 2008, 6pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/007,962, dated May 3, 2007, 8 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/007,962, dated Dec. 4, 2006, 9 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Feb. 8, 2008, 8 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Nov. 6, 2007, 3pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Aug. 24, 2007, 12 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Dec. 29, 2006, 11 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/351,539, dated Sep. 11, 2007, 9 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/351,539, dated Apr. 5, 2007, 7 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/537,575 dated May 5, 2008, 10 pp.
European Patent Office, International Search Report and Written Opinion, May 4, 2006, 7 pp.
EPO, International Search Report and Written Opinion of the International Searching Authority, International Application No. PCT/US2007/060561, Mailed May 9, 2007, 9 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/007,962, dated Jun. 6, 2008, 11pp.
Taiwanese IPO, Notice of Examination Opinions in related TW Application No. 94143637, dated Mar. 25, 2008, 12 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Apr. 16, 2009, 8 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/007,961, dated Aug. 28, 2008, 9 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Sep. 9, 2008, 10 pp.
Chinese IPO, Office Action in CN Appl. No. 200580040912.0, dated Mar. 23, 2009, 9 pp.
Guidotti Emmanuel P.
Hara Masamichi
Kuroiwa Daisuke
Leusink Gerrit J.
Suzuki Kenji
Chen Keath T
Cleveland Michael
Tokyo Electron Limited
Wood Herron & Evans LLP
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