Multi-place coating apparatus and process for plasma coating

Details Multi-place coating apparatus and process for plasma coating Multi-place coating apparatus and process for plasma coating

2011-04-19

2011-04-19

Zervigon, Rudy (Department: 1716)

Coating apparatus

Gas or vapor deposition

With treating means

C118S719000, C156S345410, C156S345310

Reexamination Certificate

active

07926446

ABSTRACT:
A coating apparatus is provided for simplifying the introduction and removal of workpieces into and from a reactor for plasma coating and to increase the throughput. The coating apparatus has a reactor with a moveable sleeve part and a base element, at least one sealed coating chamber being defined between sleeve part and base element when the latter two parts are fitted onto one another. The coating apparatus also has a device for introducing electromagnetic energy into the at least one coating chamber. The reactor has at least two coating places.

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STIC certified translation of WO01-54164, Aug. 13, 2010.
IPER from corresponding PCT/EP2003/005497 dated May 26, 2003.

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