Micro-environment reactor for processing a workpiece

Microelectronic processing machine

Microfeature workpiece processing apparatus and methods for...

Microwave apparatus for in-situ vacuum line cleaning for substra

Microwave chemical vapor deposition apparatus

Microwave choke for remote plasma generator

Microwave enhanced CVD system under magnetic field

Microwave enhanced CVD system under magnetic field

Microwave plasma apparatus employing helmholtz coils and ioffe b

Microwave plasma assisted supersonic gas jet deposition of thin

Microwave plasma chemical vapor deposition apparatus

Microwave plasma chemical vapor deposition apparatus comprising

Microwave plasma chemical vapor deposition apparatus for continu

Microwave plasma chemical vapor deposition apparatus for forming

Microwave plasma chemical vapor deposition apparatus for mass-pr

Microwave plasma CVD apparatus

Microwave plasma CVD apparatus comprising coaxially aligned mult

Microwave plasma CVD apparatus comprising dual plungers for two-

Microwave plasma CVD apparatus for the formation of a large-area

Microwave plasma CVD apparatus for the formation of functional d