Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate
2007-06-26
2007-06-26
Kackar, Ram N. (Department: 1763)
Coating apparatus
Gas or vapor deposition
Work support
C156S345510, C118S725000, C206S832000
Reexamination Certificate
active
10646607
ABSTRACT:
The present disclosure describes apparatus and methods for processing microfeature workpieces, e.g., by depositing material on a microelectronic semiconductor using atomic layer deposition. Some of these apparatus include microfeature workpiece holders that include gas distributors. One exemplary implementation provides a microfeature workpiece holder adapted to hold a plurality of microfeature workpieces. This workpiece holder includes a plurality of workpiece supports and a gas distributor. The workpiece supports are adapted to support a plurality of microfeature workpieces in a spaced-apart relationship to define a process space adjacent a surface of each microfeature workpiece. The gas distributor includes an inlet and a plurality of outlets, with each of the outlets positioned to direct a flow of process gas into one of the process spaces.
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Basceri Cem
Beaman Kevin L.
Breiner Lyle D.
Doan Trung T.
Kubista David J.
Dhingra Rakesh K
Kackar Ram N.
Perkins Coie LLP
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