Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2004-06-22
2010-02-09
Kackar, Ram N. (Department: 1792)
Coating apparatus
Gas or vapor deposition
With treating means
C118S728000, C118S724000, C156S345520, C156S345510
Reexamination Certificate
active
07658801
ABSTRACT:
A heating means is disclosed which comprises a reflector plate composed of an opaque quartz and a quartz tube welded to the surface of the reflector plate. A carbon wire which generates heat when a current is applied is inserted in the quartz tube.
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Kackar Ram N.
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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