Heat treating apparatus

Details Heat treating apparatus Heat treating apparatus

1992-03-06

1994-06-07

McFarlane, Anthony

Coating apparatus

Gas or vapor deposition

With treating means

118 50, 118724, 118728, 118733, C23C 1600

Patent

active

053186338

ABSTRACT:
A heat treating apparatus comprises a reaction tube for receiving a plurality of articles to be treated and a heating unit surrounding at least part of the reaction tube. The reaction tube comprises a first structural section, at least part of which is surrounded by the heating unit and a second structural section, at least part of which extends from the heating unit. The first structural section is made of material having thermal resistivity and thermal conductivity higher than the second structural section.

REFERENCES:
patent: 4253417 (1981-03-01), Valentijn
patent: 4745088 (1988-05-01), Inoue et al.
patent: 4989540 (1991-02-01), Fuse
patent: 5029554 (1991-07-01), Miyashita et al.

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