Heat treating apparatus having heat transmission-preventing plat

Details Heat treating apparatus having heat transmission-preventing plat Heat treating apparatus having heat transmission-preventing plat

1993-10-13

1996-07-30

Wilczewski, Mary

Coating apparatus

Gas or vapor deposition

With treating means

118726, C23C 1600

Patent

active

055407820

ABSTRACT:
A heat-treating apparatus for heat treating a plurality of objects-to-be-treated (semiconductor wafers) by loading the objects-to-be-treated into a heat treatment vessel having the lower end opened, mounted on a heat-treatment boat vertically spaced from each other, and sealing the opened end includes a heat insulator disposed on the lower end portion of the heat-treatment boat for heat-insulating the interior of the reaction vessel. The heat-insulator includes heat transmission preventing plates of opaque quartz for preventing the transmission of heat rays from a heater, and a support for supporting the heat transmission preventing plates. Thus sufficient heat-insulating effect for a heat-treating operation can be achieved, and stable heat-treatment can be conducted without impairing the function of sealing the heat-insulating unit. Furthermore, particle formation can be prevented, with a result of improved yields of the heat-treatment.

REFERENCES:
patent: 3699298 (1972-10-01), Briody
patent: 4062318 (1977-12-01), Ban et al.
patent: 5029554 (1991-07-01), Miyazaki et al.
patent: 5048800 (1991-09-01), Miyazaki et al.
patent: 5127365 (1992-07-01), Koyama et al.
patent: 5320680 (1994-06-01), Learn et al.

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