Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2003-05-16
2010-12-07
Hassanzadeh, Parviz (Department: 1716)
Coating apparatus
Gas or vapor deposition
With treating means
C156S345520
Reexamination Certificate
active
07846254
ABSTRACT:
A heat transfer assembly having a heat spreading member sandwiched between a heat source and a heat sink is disclosed. The heat sink, the heat spreading member, and the heat source are pressed against the bottom of a substrate support plate by a bias member.
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“Member.” The American Heritage® Dictionary of the English Language, Fourth Edition. Houghton Mifflin Company, 2004. Aug. 1, 2008. <Dictionary.com http://dictionary.reference.com/browse/member>.
Matyushkin Alexander
Yendler Boris S.
Applied Materials Inc.
Gramaglia Maureen
Hassanzadeh Parviz
Moser IP Law Group
Taboada Alan
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