Coating apparatus – Gas or vapor deposition – With treating means
Patent
1994-04-18
1995-04-04
Breneman, R. Bruce
Coating apparatus
Gas or vapor deposition
With treating means
118730, 118726, C23C 1600
Patent
active
054034000
ABSTRACT:
The heat sink is mounted on a semiconductor chip module sealed hermetically with a cap. The heat sink comprises an absorption means for absorbing the heat generated from a semiconductor chip, being inserted into an opening formed in a cap so as to make contact with a semiconductor chip sealed hermetically within a semiconductor chip module; a heat dissipation means exposed outside the cap for dissipating the heat of the semiconductor chip absorbed by the absorption means; and a contact surface disposed between the absorption means and the heat dissipation means and fixed on the upper surface of the cap, and the contact surface at least being coated with an adhesive material. The heat sink mounted on a semiconductor chip module can stably dissipate the heat produced from a semiconductor chip sealed hermetically within the semiconductor chip module.
REFERENCES:
patent: 4777908 (1988-10-01), Temple
patent: 4951604 (1990-08-01), Temple
Breneman R. Bruce
Chang Joni Y.
Sumitomo Electric Industries Ltd.
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