Heat treatment apparatus

Details Heat treatment apparatus Heat treatment apparatus

1992-07-08

1993-07-06

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

118715, 118725, 118728, 118733, 219390, 156345, C23C 1600

Patent

active

052249999

ABSTRACT:
A vertical type of heat treatment apparatus which houses objects for treatment loaded on a wafer boat, in a process tube and performs heat treatment, and including a cap which opens and closes an opening portion of a manifold and which is disposed on the side of an opening portion of the process tube, a support mechanism which elastically supports the cap and which is provided to a vertical motion mechanism of the wafer boat, and an expandable and contractible airtightness maintenance means which maintains airtightness on the side of the cap, and which is provided between the cap and the vertical motion mechanism.

REFERENCES:
patent: 4640223 (1987-02-01), Dozier
patent: 4998540 (1991-02-01), Fuse
patent: 5121705 (1992-06-01), Sugino

Affiliated with

Also associated with

Rating

Heat treatment apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Heat treatment apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heat treatment apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1686935