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Gas distribution system

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas distribution system and method for chemical vapor deposition

Coating apparatus – Gas or vapor deposition
Patent

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Gas distribution system for a CVD processing chamber

Coating apparatus – Gas or vapor deposition
Patent

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Gas distribution system for a post-etch treatment system

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas distribution system for muffle-type furnaces

Coating apparatus – Gas or vapor deposition
Patent

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Gas distribution system with tuning gas

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas distributor for OMVPE Growth

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Gas distributor for vapor coating method and container

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Gas distributor having directed gas flow and cleaning method

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas driven planetary rotation apparatus and methods for...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Gas exhaust system and pump cleaning system for a semiconductor

Coating apparatus – Gas or vapor deposition
Patent

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Gas feed ceramic structure for semiconductor-producing...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Gas feeding device for controlled vaporization of an organanomet

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Gas feeding device for controlled vaporization of an organometal

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Gas feeding device for controlled vaporization of an organometal

Coating apparatus – Gas or vapor deposition
Patent

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Gas feeding system for chemical vapor deposition reactor and...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas feedthrough with electrostatic discharge characteristic

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Gas flow division in a wafer processing system having...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Gas flow system for CVD reactor

Coating apparatus – Gas or vapor deposition
Patent

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Gas flow systems in CCVD reactors

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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