Downward mechanism for support pins

Dry etching device

Edge sealing structure for substrate in low-pressure...

Electrode-built-in susceptor

Electrode-built-in susceptor and a manufacturing method...

Elemental mercury source for metal-organic chemical vapor deposi

Engagement mechanism for semiconductor substrate deposition...

Epitaxial growth furnace

Epitaxial growth method and apparatus therefor

Epitaxial growth reactor provided with a planetary support

Evaporator tool with remote substrate reorientation mechanism

Film deposition processing device having transparent support and

Film deposition using a finger type shadow frame

Film formation apparatus

Film forming unit

Film-forming device with a substrate rotating mechanism

Fixture for VPE reactor

GaAs anneal boat design and method for use

Gas driven planetary rotation apparatus and methods for...

Gas foil rotating substrate holder