Electrode-built-in susceptor

Details Electrode-built-in susceptor Electrode-built-in susceptor

2007-05-01

2007-05-01

Kackar, Ram (Department: 1763)

Coating apparatus

Gas or vapor deposition

Work support

C118S500000, C156S345510, C156S345520, C156S345530

Reexamination Certificate

active

10615894

ABSTRACT:
An electrode-built-in susceptor is formed by a susceptor base body which is made of an aluminium-nitride-group-sintered-member on one of which surface a plate sample is mounted, an inner electrode which is built in the susceptor member, a power supplying terminal which is disposed in the susceptor base body so as to be attached to the inner electrode, and an insulating layer which is formed mainly by one of a boron nitride, a lithium oxide, an aluminium oxide, or a magnesium oxide is formed between the inner electrode and the mounting surface.By doing this, it is possible to provide an electrode-built-in susceptor which has a superior durability under a high temperature oxidizing atmosphere condition without a concern in that a thermal efficiency decreases and a plate sample is contaminated.

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English translation of Abstract for Japanese Patent Application No. JP-4-3001136.
English translation of Abstract for Japanese Patent Application No. JP-6-151044.
English translation of Abstract for Japanese Patent Application No. JP-6-151332.
English translation of Abstract for Japanese Patent Application No. JP-10-189696.
English translation of Abstract for Japanese Patent Application No.2003-124296.
English translation of Abstract for Japanese Patent Application No. JP-2001-085505.
Office Action issued by Japanese Patent Office on Oct. 18, 2005 in connection with corresponding application No. 2002-207234 and English translation thereof.
Decision of Rejection issued by Japanese Patent Office on Mar. 7, 2006 in connection with corresponding Japanese Patent application No. 2002-207234 and English translation thereof.

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