Target holder with mechanical scanning
Thermal conditioning apparatus
Thermal processing apparatus and process
Thermally floating pedestal collar in a chemical vapor depositio
Thin film forming equipment and method
Thin-film forming apparatus with magnetic bearings and a non-con
Transfer arm apparatus and semiconductor processing system using
Transport device for substrates to be coated in a vacuum coating
Transporting device with roller systems for vacuum-coating insta
Turntable mechanism
Two-piece chuck