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Object-supporting boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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On wafer evaporation installation

Coating apparatus – Gas or vapor deposition – Work support
Patent

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One piece shim

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Orientless wafer processing on an electrostatic chuck

Coating apparatus – Gas or vapor deposition – Work support
Patent

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