Rapid thermal heating apparatus including a substrate support an

Rapid thermal processing apparatus for processing semiconductor

Rapid thermal processing susceptor

Rapid-switching rotating disk reactor

Reaction chambers for CVD systems

Reactor apparatus for semiconductor wafer processing

Reactor for coating plane substrates and method for...

Reactor for processing a microelectronic workpiece

Reduced friction lift pin

Reducing backside deposition in a substrate processing apparatus

Reflector apparatus for chemical vapor deposition reactors

Removable ring for controlling edge deposition in substrate proc

Retainer ring for securing substrates in a vacuum deposition sys

Rotary chuck including pins for lifting wafers

Rotary substrate processing apparatus and method

Rotating susceptor