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Edge sealing structure for substrate in low-pressure...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Electrode-built-in susceptor

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Electrode-built-in susceptor and a manufacturing method...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Elemental mercury source for metal-organic chemical vapor deposi

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Engagement mechanism for semiconductor substrate deposition...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Epitaxial growth furnace

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Epitaxial growth method and apparatus therefor

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Epitaxial growth reactor provided with a planetary support

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Evaporator tool with remote substrate reorientation mechanism

Coating apparatus – Gas or vapor deposition – Work support
Patent

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