Coating apparatus – Gas or vapor deposition – Work support
Patent
1980-10-03
1982-05-18
Smith, John D.
Coating apparatus
Gas or vapor deposition
Work support
118720, 118715, C23C 1308
Patent
active
043299385
ABSTRACT:
An evaporation fixture for sequentially vapor depositing dielectric or ot materials on the surface of a substrate at various slant and rotational angles without opening the fixture. A connecting rod extends from the exterior of the evaporation fixture to the interior of the fixture where it is connected to a cam mechanism. The cam mechanism is in turn mechanically coupled to a reorientation ring that is concentric with the substrate holding ring of the fixture. A slot in the reorientation ring is in engagement with the substrate holding mechanism connecting pin. Movement of the connecting rod at the end exterior to the evaporation fixture causes movement of the reorientation ring with respect to the holding ring and by means of the slot-pin coupling causes rotational and angular reorientation of the substrate with respect to the evaporated material.
REFERENCES:
patent: 2351537 (1944-06-01), Osterberg et al.
patent: 2532971 (1950-12-01), Van Leer et al.
patent: 3594227 (1971-07-01), Oswald
patent: 3746571 (1973-07-01), Little, Jr.
patent: 3783822 (1974-01-01), Wollam
patent: 3859956 (1975-01-01), Paola
Plantz Bernard F.
Smith John D.
The United States of America as represented by the Secretary of
LandOfFree
Evaporator tool with remote substrate reorientation mechanism does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Evaporator tool with remote substrate reorientation mechanism, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Evaporator tool with remote substrate reorientation mechanism will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-482066