Depositing polysilicon films having improved uniformity and...
Deposition ring anti-rotation apparatus
Device comprising a flat susceptor rotating parallel to a refere
Device for holding disk-shaped substrates in the vacuum chamber
Device for mounting a substrate and method for producing an...
Device to cover a flat surface with a layer of uniform thickness
Diagnostic pedestal assembly for a semiconductor wafer processin
Differential pressure CVD chuck
Distributed source assembly
Door closure apparatus for encapsulating a wafer paddle
Downward mechanism for support pins
Dry etching device