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Wafer boat for supporting silicon wafers

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer carrier

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer carrier for growing GaN wafers

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer chuck for producing an inert gas blanket and method...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer feeding apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer for carrying semiconductor wafers and method detecting waf

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer holder method and apparatus in a vacuum deposition system

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer holder with peripheral lift ring

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer holding apparatus

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer spacing mask for a substrate support chuck and method of f

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer support device

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer support device in semiconductor manufacturing device

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer support plate assembly having recessed upper pad and...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer support system

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer support system

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer support system

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer support system

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer support system

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer support system

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer supporting jig and a decompressed gas phase growth method

Coating apparatus – Gas or vapor deposition – Work support
Patent

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