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Sample fixing device of evaporation machine

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Segmented substrate for improved ARC-JET diamond deposition

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Self aligning lift mechanism

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Self aligning non contact shadow ring process kit

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Self-aligning lift mechanism

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Semiconductor manufacturing apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Semiconductor manufacturing device

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Semiconductor processing apparatus with a heat resistant...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Semiconductor processing apparatus with lift pin structure

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Semiconductor processing chamber having diamond coated component

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Semiconductor producing apparatus comprising wafer vacuum chucki

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Semiconductor wafer holder with CVD silicon carbide film coating

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Semiconductor wafer holding assembly

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Semiconductor wafer process chamber with suspector back coating

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Semiconductor wafer support

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Semiconductor wafer support lift-pin assembly

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Semiconductor wafer support lift-pin assembly

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Semiconductor wafer support platform

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Shaft cooling mechanisms

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Shape memory alloy lift pins for semiconductor processing equipm

Coating apparatus – Gas or vapor deposition – Work support
Patent

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