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Heat treatment boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Heat treatment boat support

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Heater temperature uniformity qualification tool

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Heater with detachable ceramic top plate

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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High efficiency electro-static chucks for semiconductor...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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High resolution substrate holder leveling device and method

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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High speed apparatus for forming capacitors

Coating apparatus – Gas or vapor deposition – Work support
Patent

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High temperature electrostatic chuck

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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High temperature susceptor

Coating apparatus – Gas or vapor deposition – Work support
Patent

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High-speed rotational vapor deposition apparatus and high-speed

Coating apparatus – Gas or vapor deposition – Work support
Patent

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