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Vacuum vapor-deposition apparatus for coating an optical substra

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vapor deposition apparatus and method for forming thin film

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vapor deposition apparatus and vapor deposition method

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vapor phase growth system and a gas-drive motor

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical boat for holding semiconductor wafers

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical heat treatment device for semiconductor

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical oven with a boat for the uniform treatment of wafers

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Vertical thermal treatment apparatus

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Vertical type vapor-phase growth apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical type vapor-phase growth apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical wafer boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer boat for supporting silicon wafers

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer carrier

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer carrier for growing GaN wafers

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer chuck for producing an inert gas blanket and method...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer feeding apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer for carrying semiconductor wafers and method detecting waf

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer holder method and apparatus in a vacuum deposition system

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer holder with peripheral lift ring

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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