Vertical boat for holding semiconductor wafers

Details Vertical boat for holding semiconductor wafers Vertical boat for holding semiconductor wafers

1995-05-17

1996-07-09

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Work support

118500, 206454, 211 41, 4272481, C23C 1600

Patent

active

055340741

ABSTRACT:
A vertical boat comprises a plurality of rods extending vertically in parallel from a base. Each rod has a plurality of slots cut along the length of the respective rod. The slots of each rod are vertically aligned with the slots of the other rods and have top and bottom surfaces that are peaked. The rods are arranged so that a wafer can be jointly received by a corresponding slot from each rod, thereby allowing the boat to hold the wafers in a stack with both sides of the wafers exposed.

REFERENCES:
patent: 947880 (1910-02-01), Babington
patent: 1739037 (1929-12-01), Louthan
patent: 3226254 (1965-12-01), Reuschel
patent: 4184841 (1980-01-01), Robinson et al.
patent: 4504224 (1985-03-01), Hewitt
patent: 4653636 (1987-03-01), Armstrong
patent: 4669612 (1987-06-01), Mortensen
patent: 4872554 (1989-10-01), Quernemoen
patent: 5054418 (1991-10-01), Thompson
patent: 5169453 (1992-12-01), Takagi
patent: 5169684 (1992-12-01), Takagi
patent: 5192371 (1993-03-01), Shuto

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