Vertical boat

Details Vertical boat Vertical boat

1995-06-05

1996-04-16

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Work support

118500, 118715, 432253, B05C 1302

Patent

active

055078737

ABSTRACT:
A vertical boat for holding a plurality of semiconductor wafers comprising two end members (5) positioned at the top and the bottom of the vertical boat, and a plurality of support members (3,4) vertically mounted on the end members (5), the support members (3,4) including two front support members (3) located on the wafer inserting side and at least one rear support members (4) located on the rear side of the boat, each support member (3,4) having a series of slits (3a,4a) formed thereon at a predetermined interval and a series of support portions defined by the slits (3a,4a) for supporting semiconductor wafers (1), wherein the front support member (3) is generally formed by a circular arc plate, and wherein each angle (A,B) formed between the wafer inserting direction (X) and a line linking the front end (3b) of the support portion of the front support member (3) to the center (1a) of the wafer (1) is 100 degrees or more.

REFERENCES:
patent: 4412812 (1983-11-01), Sadowski et al.
patent: 4981222 (1991-01-01), Lee

Affiliated with

Also associated with

Rating

Vertical boat does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vertical boat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vertical boat will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-322526