Wafer carrier for growing GaN wafers

Details Wafer carrier for growing GaN wafers Wafer carrier for growing GaN wafers

2007-06-26

2007-06-26

Hassanzdeh, Parviz (Department: 1763)

Coating apparatus

Gas or vapor deposition

Work support

C118S724000, C118S500000

Reexamination Certificate

active

10975902

ABSTRACT:
A wafer carrier for growing wafers includes a plate having a first surface and a second surface, a plurality of openings extending from the first surface to the second surface of the plate, and a porous element disposed in each of the plurality of openings, each porous element being adapted to support one or more wafers. The wafer carrier also has a blind central opening extending from the second surface toward the first surface of the plate, and a plurality of shafts extending outwardly from the blind central opening. Each shaft has a first end in communication with the blind central opening and a second end in communication with one of the porous elements for providing fluid communication between the blind central opening and one of the porous elements. Suction is formed at a surface of each porous element by drawing vacuum through the blind central opening and the shafts.

REFERENCES:
patent: 3549847 (1970-12-01), Clark
patent: 3633537 (1972-01-01), Howe
patent: 3845738 (1974-11-01), Berkman et al.
patent: 4100879 (1978-07-01), Goldin et al.
patent: 4877573 (1989-10-01), Nilsson
patent: 4906011 (1990-03-01), Hiyamizu et al.
patent: 4981345 (1991-01-01), Berry et al.
patent: 5002011 (1991-03-01), Ohmine et al.
patent: 5148714 (1992-09-01), McDiarmid
patent: 5323701 (1994-06-01), Sommer
patent: 5336324 (1994-08-01), Stall et al.
patent: 5370739 (1994-12-01), Foster et al.
patent: 5421595 (1995-06-01), Cripe et al.
patent: 5529626 (1996-06-01), Stewart
patent: 5534073 (1996-07-01), Kinoshita et al.
patent: 5562947 (1996-10-01), White et al.
patent: 5575856 (1996-11-01), Foster et al.
patent: 5676758 (1997-10-01), Hasegawa et al.
patent: 5759281 (1998-06-01), Gurary et al.
patent: 5788777 (1998-08-01), Burk, Jr.
patent: 5835677 (1998-11-01), Li et al.
patent: 5840124 (1998-11-01), Gurary et al.
patent: 5976260 (1999-11-01), Kinoshita et al.
patent: 6001183 (1999-12-01), Gurary et al.
patent: 6032715 (2000-03-01), Ohkubo et al.
patent: 6080241 (2000-06-01), Li et al.
patent: 6112735 (2000-09-01), Farnworth
patent: 6149727 (2000-11-01), Yoshioka et al.
patent: 6382609 (2002-05-01), Namioka et al.
patent: 6444027 (2002-09-01), Yang et al.
patent: 6464795 (2002-10-01), Sherstinsky et al.
patent: 6517420 (2003-02-01), Ishikawa et al.
patent: 6606234 (2003-08-01), Divakar
patent: 2004/0091342 (2004-05-01), Yajima et al.
patent: 55143036 (1980-11-01), None
patent: 62053774 (1987-03-01), None
patent: 03184327 (1991-08-01), None
patent: 05259051 (1993-10-01), None
REMBAR Rhenium Technical Info. Taken from www.rembar.com/Rhenium.htm.
Basics of Design Engineering: Refractory Metals. Taken from www.machinedesign.com.

Affiliated with

Also associated with

Rating

Wafer carrier for growing GaN wafers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer carrier for growing GaN wafers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer carrier for growing GaN wafers will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3871355