Reflector apparatus for chemical vapor deposition reactors

Removable ring for controlling edge deposition in substrate proc

Retainer ring for securing substrates in a vacuum deposition sys

Rotary chuck including pins for lifting wafers

Rotary substrate processing apparatus and method

Rotating susceptor

Sample fixing device of evaporation machine

Segmented substrate for improved ARC-JET diamond deposition

Self aligning lift mechanism

Self aligning non contact shadow ring process kit

Self-aligning lift mechanism

Semiconductor manufacturing apparatus

Semiconductor manufacturing device

Semiconductor processing apparatus with a heat resistant...

Semiconductor processing apparatus with lift pin structure

Semiconductor processing chamber having diamond coated component

Semiconductor producing apparatus comprising wafer vacuum chucki

Semiconductor wafer holder with CVD silicon carbide film coating

Semiconductor wafer holding assembly

Semiconductor wafer process chamber with suspector back coating