Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate
2011-07-26
2011-07-26
Huff, Mark F (Department: 1721)
Coating apparatus
Gas or vapor deposition
Work support
C118S500000, C118S503000, C204S298150
Reexamination Certificate
active
07985296
ABSTRACT:
A sample fixing device of an evaporation machine includes a first transmission mechanism having a first rotation axis driven by a driving device and a first rotation wheel; a fixing plate and a support frame; a pair of second transmission mechanisms at opposite sides of the first rotation wheel, and including a second rotation wheel revolving around the first rotation wheel, a second rotation axis passing and attached to the second rotation wheel and the fixing plate, and a third rotation wheel connected to the second rotation axis; and a third transmission mechanism including a fourth rotation wheel driven by the third rotation wheel and a sample support axis passing and attached to the fourth wheel and the support arm; wherein an axes of the sample support axis perpendiculars to an extension axes of the first rotation axis so that the sample fixing device can rotate and revolve.
REFERENCES:
patent: 4034704 (1977-07-01), Wossner et al.
patent: 2007/0034148 (2007-02-01), Lin
patent: 1288963 (2007-10-01), None
English Translation of TW-1288963 (by Applicant on Nov. 6, 2008 IDS).
Chen Ching-Ching
Hsu Chen-Chun
HDLS IPR Services
Huff Mark F
Ruggles John S
Shih Chun-Ming
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