Self-aligning lift mechanism

Details Self-aligning lift mechanism Self-aligning lift mechanism

1997-07-14

2000-09-19

Beck, Shrive

Coating apparatus

Gas or vapor deposition

Work support

118729, 118500, 156345, C23C 1600

Patent

active

061206091

ABSTRACT:
An improved lift mechanism includes a configuration having two sections of bellows welded to a central flange. The central flange provides support for a precisely aligned lift pin support structure. The efficient utilization of space provides space for an enlarged stem while minimizing the interaction between pieces within the processing chamber. Outside the vacuum limits of the processing chamber, a catch arrangement is provided as part of a linkage that allows a single vertical drive to be utilized to manipulate both the vertical motion of lift pins and vertical motion of the pedestal supporting a substrate in a processing chamber. In one configuration a unitized lift mechanism can be replaced as a unit. Particular orientations for utilizing a lift pin support plate with ceramic inserts is disclosed to reduce particle generation within the processing chamber.

REFERENCES:
patent: 5458688 (1995-10-01), Watanabe
patent: 5558717 (1996-09-01), Zhao et al.
patent: 5695568 (1997-12-01), Sinha et al.
patent: 5772773 (1998-06-01), Wytman

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