Semiconductor manufacturing device

Details Semiconductor manufacturing device Semiconductor manufacturing device

2011-01-04

2011-01-04

Hassanzadeh, Parviz (Department: 1716)

Coating apparatus

Gas or vapor deposition

Work support

C118S715000, C118S724000, C118S725000, C156S345370, C156S345510, C156S345520, C156S345530, C361S234000

Reexamination Certificate

active

07862659

ABSTRACT:
The present invention relates to a semiconductor manufacturing device that a maintenance or a repairing is easy so that an efficiency of manufacturing can be enhanced because a high temperature of a susceptor can be rapidly down. The present invention relates to a semiconductor manufacturing device that an efficiency of manufacturing can be enhanced because a heater for heating the semiconductor is heated by an external heating device.

REFERENCES:
patent: 2002/0195438 (2002-12-01), Babikian
patent: 2005/0229854 (2005-10-01), Moroz
patent: 2008/0083732 (2008-04-01), Shinma et al.

Affiliated with

Also associated with

Rating

Semiconductor manufacturing device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor manufacturing device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor manufacturing device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2714535